At the 4-day TaiyangNews High Efficiency Solar Technologies 2024 conference in December 2024, Jan Krausmann of SINGULUS TECHNOLOGIES AG shared the German PV production equipment company’s high-throughput HJT solar cell production equipment solutions. All of these, he said, come with a flexible tray design to ensure these are compatible with all wafer sizes, up to G12/G12 half-cut.
Its high-volume equipment for HJT solar cell fabrication covers wet chemical treatment, inline PECVD, inline PVD and PET for edge passivation processes, shared Krausmann who is responsible for Product Management Solar at SINGULUS TECHNOLOGIES.
SILEC III wet chemical treatment, for instance, is a high throughput tool from SINGULUS with over 8,000 wph for G12 and 14,000 wph for G12 half-cut cells. It has a low wafer thickness adaption and is for texturing and cleaning.
The inline PECVD equipment for a-Si (i,n,p) and nc-Si (n,p) deposition uses IP-protected linear plasma source design for high deposition rates and highly uniform film deposition, he added. It also has a fully automated NF3 cleaning process.
Its inline PVD equipment for ITO deposition has an integrated CRS for double-sided deposition. It offers high accuracy of wafer placement in tray pockets, has high utilization and reduced OpEx.
SINGULUS’ GENERIS PET tool, explained Krausmann, is an industrialized high volume inline solution for the deposition of edge cover layers to realize passivated edges for cells split with laser. Its unique tray design can process all wafer and cut formats with a capacity of 4,800 wafer cuts/tray.
For more presentation videos and conference summaries for all 4 days of the TaiyangNews High Efficiency Solar Technologies 2024 Conference, click here for days 1 and 2, and here for days 3 and 4.