Key takeaways:
CETC Red Solar detailed updates to its PECVD, LPCVD, ALD, and thermal systems designed for TOPCon rear-side stack formation and passivation
New configurations, such as stacked graphite boats and higher-capacity LPCVD systems, aim to increase wafer throughput
The company’s turnkey projects, including multi-GW installations abroad and TOPCon lines in China, were used to illustrate its operational experience
Chun Zhang, CTO of CETC Red Solar, presented the company’s development of TOPCon cell equipment and turnkey solutions at the TaiyangNews Cell & Module Production Equipment & Processing Materials Conference.
Established in 2009, Red Solar, a subsidiary of China Electronics Technology Group Corporation (CETC), focuses on photovoltaic equipment, turnkey solutions, intelligent manufacturing systems, and semiconductor tools.
Zhang highlighted that the company has supplied equipment to major Chinese cell manufacturers, supporting the development of TOPCon, heterojunction, and perovskite cell structures. He also noted that the company provides ‘freedom-to-operate’ protection on all products to reduce patent-related risks for customers.
Moving to technology, Zhang outlined CETC Red Solar’s equipment portfolio for TOPCon manufacturing. The company offers 2 major categories: thermal processing (including annealing, oxidation, and diffusion furnaces) and passivation deposition systems (PECVD, LPCVD, ALD, PVD). The PECVD platform, initially developed for silicon nitride deposition, has evolved to support integrated rear-side stack formation for TOPCon. Launched in 2024, its latest ‘stacked graphite boat’ PECVD system uses a 4-tube configuration that accommodates 1,024 G12 wafers per boat, compared to 616 in a standard 6-tube system. According to Zhang, this design reduces material usage and the cost of ownership. LPCVD continues to gain traction for rear passivation stacks, particularly due to double-loading improvements and reduced wraparound. Zhang presented Red Solar’s LPCVD equipment for SiOx and i-poly-Si deposition, featuring a 6-tube configuration that can accommodate 2,200 G12-sized wafers per boat. The company’s ALD tools with a 4-tube configuration are undergoing testing at top cell manufacturers and are planned for commercial launch at the end of the year.
Zhang also described CETC Red Solar’s edge passivation deposition (EPD) tool, which uses a cone-stack batch process to deposit amorphous silicon and silicon nitride layers on cut-edge surfaces. He then presented the company’s thermal systems that feature multiple temperature zones and independently adjustable gas injectors to improve uniformity across wafers. Zhang also highlighted company’s efforts in PVD for rear passivation stacks and carrier-transport layers, noting potential applicability to back-contact, heterojunction, and tandem structures.
The final part of the presentation addressed the company’s turnkey solutions, offered since 2010, covering design, procurement, installation, ramp-up, optimization, and long-term support. Zhang showcased several completed projects, including a China-Egypt renewable-energy laboratory, an integrated 4 GW wafer-to-module production line in Turkey, and a 600 MW PERC cell line in India. He also referenced a 3.5 GW TOPCon project in Jiangsu Province, where CETC Red Solar provided a one-stop solution, achieving an average cell efficiency of 25.4% and a 96% yield. Zhang concluded by emphasizing the advantage of CETC’s state-owned background and technical resources, positioning Red Solar to support manufacturers with both equipment and operational experience.