RENA Technologies has received three additional major orders for high-throughput equipment for the wet-chemical processing of 200 mm and 300 mm wafers. The systems are destined for semiconductor manufacturers with production sites in Europe, Asia, and the United States.
Key factors in the contract awards included the flexibility to integrate customer-specific options into the equipment concepts. These options enable a higher degree of automation, enhanced process control, and unattended operation. At the same time, they provide the basis for stable process conditions and a long-term reduction in total cost of ownership. High equipment availability, efficient energy consumption, and reduced maintenance requirements all contribute to this. Fewer unplanned downtimes and reproducible processes also help lower operating costs throughout the system’s entire life cycle.
High-Precision Wet Processing for 300 mm Wafers
Two fully automated systems for processing 300 mm wafers focus on wet-chemical etching processes that require particularly high uniformity across the entire wafer surface. Uniform material removal helps ensure that defined process parameters are maintained reproducibly and prepares the wafers for subsequent production steps.
The etching process is followed by high-precision cleaning sequences designed to remove contaminants and particles down to the nanometer scale. Automated wafer handling and continuous monitoring of the relevant process parameters enable stable and reproducible processing without constant operator intervention.
Precision and Automation in 200 mm Wafer Cleaning
Another order comprises a high-throughput cleaning system for 200 mm wafers. This process concept is designed to meet the increasing particle-control requirements of 200 mm wafer manufacturing. Automated process sequences, continuous monitoring of relevant process parameters, and customer-specific functions support consistently high cleaning quality.
“These orders demonstrate the importance of flexible equipment concepts, customer-specific functions, short delivery times, and precise process control for demanding semiconductor processes. With our fully automated systems, we help customers expand their production capacities while achieving stable, reproducible processes and a high degree of automation,” explains Peter Schneidewind, CEO of RENA Technologies. “At the same time, the orders confirm the international confidence in our proven platforms, technology and process expertise.”
