exateq Offers Dedicated Batch SDE & Texturing Tools For HJT

qEtch 613 SDE and qTex 613 provide specialized wafer preparation platforms for G12 sizes, combining high throughput with stable yields
Inline Texturing Platform: exateq’s qTex 613 tool supports alkaline batch texturing for wafers up to G12, featuring 8 active chemical baths and a throughput of up to 24,000 half-wafers per hour. (Source: exateq GmbH)
Inline Texturing Platform: exateq’s qTex 613 tool supports alkaline batch texturing for wafers up to G12, featuring 8 active chemical baths and a throughput of up to 24,000 half-wafers per hour. (Source: exateq GmbH)
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Key Takeaways
  • exateq supplies both standard platforms and custom-tailored solutions, from defined specifications to co-developed processes

  • qTex 613 handles alkaline texturing of 208 wafers per basket, delivering 24,000 half wafers per hour

  • qEtch 613 SDE focuses on saw damage removal using KOH-aided chemistry, featuring 4 chemical baths and a shorter 20 m footprint compared to 26.3 m for texturing

Germany-based exateq, which focuses primarily on Heterojunction technology (HJT), sets itself apart by offering both standard tool platforms and custom-tailored solutions. For customers with clear specifications, exateq delivers precisely what is needed. At the same time, it also supports clients who turn to the company for help in developing a process. In these cases, it collaborates closely with partners to provide a complete packaged solution.

For the latest TaiyangNews Market Survey on Solar Cell Production Equipment 2025, we have received data for 2 updated products from the company in this survey, each designed to execute SDE and texturing separately. As the names suggest, the qEtch 613 SDE is dedicated to SDE, and the qTex 613 is for batch texturing using alkaline media. The latter, texturing tool can process wafer sizes up to G12. Each process basket holds 208 wafers, with loading and unloading possible both manually and automatically. The tool features 8 active processing baths and 8 for rinsing and cleaning, offering a throughput of up to 24,000 half wafers per hour with a mechanical yield loss of less than 0.1% and uptime of 96.5%.

The qEtch 613 SDE shares the same basic configuration as its texturing counterpart, differing mainly in its application. This system also uses KOH as the process chemical, with hydrogen peroxide, HF, and HCl for cleaning. It includes 4 chemical baths and 5 baths for cleaning and rinsing, and offers a higher maximum throughput of 24,000 half wafers per hour. The main distinction is the length: 20 m for the SDE tool versus 26.3 m for the texturing version.

The text is an edited excerpt from TaiyangNews’ latest Market Survey on Solar Cell Production Equipment 2025, which can be downloaded for free here.

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