PECVD Based Solution For Polysilicon in TOPCon Cells

During the TaiyangNews Virtual Conference on High Efficiency Solar Technologies 2022 – TOPCon, HJT and Beyond, Today & Tomorrow, Lead Micro's Chief Scientist, Prof. Boachen Liao represented the equipment production side at the event. He batted for PEALD efficiency claiming it to be slightly higher compared to PECVD deposition technology for applying tunnelling oxide of TOPCon process flow, citing PEALD+PECVD technology's ability to not affect the deposition rate with in-situ doping. It is also easy to clean compared to LPCVD.

The 3-Day Conference took place from 23-25 November 2022, and had leaders from research, production equipment and materials supply as well as cell/module manufacturing and market analysis.